China Electronics Engineering Design Institute Denies Country Is Building EUV Lithography Machine Plant

中国电子院(中国电子工程设计院)否认国家在建EUV光刻机厂。

Sept. 19 -- The China Electronics Engineering Design Institute has refuted rumors claiming the country is building a plant to produce extreme ultraviolet lithography machines, which are used to pattern the finest details on the most advanced chips.

9月19日——中国电子工程设计研究院驳斥了声称该国正在建设一家工厂生产极紫外光刻机的谣言,这种机器用于在最先进的芯片上进行精密制造。

The picture recently circulating online does not show an EUV lithography machine plant but a high-energy photon source project under construction in Beijing’s Huairou district, the CEEDI said yesterday.

中国电子院昨日表示,最近网上流传的图片显示的不是EUV光刻机厂,而是北京怀柔区正在建设的高能同步辐射光源项目。

According to a recent online rumor, Tsinghua University has managed to giantize Advanced Semiconductor Material Lithography’s lithography machine through an extreme ultraviolet project in Beijing’s neighboring xiong’an New Area, achieving homegrown production.

根据最近的网上传言,清华大学已经通过北京邻近的雄安新区的极紫外项目成功实现了先进半导体材料光刻的光刻机的巨型化,实现了本土生产。

The HEPS project in the picture is China’s first ever and has the world’s brightest fourth-generation synchrotron radiation light sources, the CEEDI noted, adding that it started construction in 2019 and is expected to come on stream by the end of 2025.

电子院指出,图中的高能同步辐射光源(HEPS)项目是中国有史以来第一个拥有世界上最亮的第四代同步辐射光源的项目,并补充说,它于2019年开始建设,预计将于2025年底投入使用。
(译注:高能同步辐射光源(HEPS)是中科院、北京市共建怀柔科学城的核心装置,由国家发展改革委批复立项,中科院高能所承担建设,为“十三五”国家重大科技基础设施。据说这个光刻只是其中的小应用之一,设施建成后,将成为世界上发射度最低、亮度最高的第四代同步辐射光源之一,最“亮”的光将帮助人类更细致观察微观物质的细节,为国家解决在资源、能源、环境、人口和健康等诸多领域面临的挑战提供科学基础。2023年3月,HEPS增强器全线贯通、储存环隧道设备启动安装、光束线站前端区启动试安装,HEPS全面进入科研设备安装阶段。)

The project is a collaborative effort of the design team led by State Development and Investment’s Chief Scientist Lou Yu and several scientific research and design teams of the CEEDI.

该项目是由国家发展与投资局首席科学家娄宇领导的设计团队和中欧国际工商学院的几个科研设计团队合作完成的。

A HEPS is an ultra-precise, ultra-high-speed, giant X-ray machine that generates small beams that can penetrate matter for three-dimensional scanning to observe molecules and atoms, the CEEDI explained.

电子院解释说,HEPS是一台超精确、超高速、巨型X射线机,它产生的小光束可以穿透物质进行三维扫描,以观察分子和原子。